HRC - calibration of translation stages

To: Distribution

From: M. Zombeck

Subject: Calibration of Neat translation stages.

Date: 25 February 1999

The linearity and repeatability of three 8 inch and one 18 inch HRC Laboratory NEAT translation stages were determined using an HP 5529A Dynamic Calibrator (laser interferometer).

A summary of the results is given below. The individual stage calibration results are provided in postscript and can be obtained by clicking on the appropriate table entry.

Description Serial No. Leadscrew Cumulative Error⁽¹⁾ Lead Screw Periodic Error⁽²⁾ Repeatability⁽³⁾ Home Position Repeatability Postscript File

18" HM-1800 001 25 microns 15 microns < 1 micron 4 microns sn001.ps

8" LM-800 002 12 2* < 1 6 sn002.ps

8" LM-800 003 < 1 7 < 1 4 sn003.ps

8" LM-800 004 15 2 < 1 1 sn004.ps

Specs. ⁽⁴⁾ - 20 (46) ⁽⁵⁾ 10 < 2.5 < 2.5 --------

⁽¹⁾ Runout for total travel

⁽²⁾ Peak-to-peak; 2 mm period

⁽³⁾ Neat recommended repeatability test (run open loop):

Move stage to mid-stage position and reset interferometer to 0.0000

Move +5 mm and take reading

Move -5 mm and take reading

Move +5 mm and take reading

Repeat the above 3 times

* First 130 mm

⁽⁴⁾ Specifications are for "precision" stages; we purchased "commercial".

⁽⁵⁾ Value for 18" stage

Description	Serial No.	Leadscrew Cumulative Error⁽¹⁾	Lead Screw Periodic Error⁽²⁾	Repeatability⁽³⁾	Home Position Repeatability	Postscript File
18" HM-1800	001	25 microns	15 microns	< 1 micron	4 microns	sn001.ps
8" LM-800	002	12	2*	< 1	6	sn002.ps
8" LM-800	003	< 1	7	< 1	4	sn003.ps
8" LM-800	004	15	2	< 1	1	sn004.ps
Specs. ⁽⁴⁾	-	20 (46) ⁽⁵⁾	10	< 2.5	< 2.5	--------